We designed this course to span all of engineering to explore the theory and practice of MEMS (micro electrical mechanical systems) fabrication, which integrates hands-on learning with the classroom. Graduate students learn the fundamentals of engineering on the microscale while concurrently utilizing the Marcus Cleanroom throughout a 9 laboratory set to create microresonator sensors (shown below). These sensors are simpler versions of the accelerometers that exist in students’ smart phones. Students have stated that the intellectual foundation of the classroom and the hands-on skills learned in the cleanroom were the best aspects of the course.
